The 27-year-old was one of the star performers on the night and got himself on the scoresheet late on in the second half.
“We did that really well a few times in the first half, and Manuel Neuer made some excellent saves,” Özil told Arsenal Player.
“In the second half we waited for our chance and we took them when they came. I think we were deserved winners, because we played in a very disciplined manner and didn’t allow Bayern to have many big chances.”
Özil is expected to start again but Arsenal have an extensive injury list with Walcott, Oxlade-Chamberlain, Arteta, Ramsey, Ospina, Wilshere, Welbeck and Bellerin all out.
Bayern meanwhile are missing Götze and Rode while Badstuber and Bernat are both doubts leading up to the game.
Bayern Munich v Arsenal
Kick-Off: 19:45 GMT
Referee: Gianluca Rocchi
Stadium: Football Arena Munchen
Bayern: Neuer; Lahm, Martínez, Boateng, Alaba; Alonso; Robben, Thiago, Douglas Costa; Müller, Lewandowski.
Out: Götze (groin), Ribéry (ankle), Rode (thigh)
Doubtful: Badstuber (thigh), Bernat (groin)
Arsenal: Čech; Debuchy, Mertesacker, Koscielny, Monreal; Coquelin, Cazorla; Campbell, Özil, Sánchez; Giroud.
Out: Walcott (calf), Oxlade-Chamberlain (hamstring), Arteta (ankle), Ramsey (hamstring), Ospina (shoulder), Wilshere (calf), Rosický (knee), Welbeck (knee), Bellerín (groin)