Arsenal retained the FA for the second year in a row following foals from Theo Walcott, Alexi Sanchez, Per Mertesacker and Giroud.
Özil received a rating of 7.46 from Who Scored. The Germany international made 46 passes throughout the game and maintained a passing accuracy of 91.3%.
The 26-year-old playmaker took no shots on target, made three successful dribbles, one accurate crosses and three key passes.
Özil has finished the season with nine assists and five goal in 33 appearances for Arsenal in all competitions.
Referee: Jonathan Moss
Managers: Arsene Wenger (Arsenal), Tim Sherwood (Aston Villa)
Arsenal: Szczesny, Bellerin, Mertesacker, Koscielny, Monreal, Coquelin, Cazorla, Ramsey, Özil, Alexis, Walcott
Aston Villa: Given, Hutton, Vlaar, Okore, Richardson, Westwood, Delph (c), Cleverley, Grealish, N’Zogbia, Benteke
Goals: .40 Theo Walcott, .50 Sanchez, .62 Mertesacker, .90+3 Giroud