The Gunners were 4-0 up at half time following a hat-trick from Theo Walcott and a goal from Jack Wilshere.
McAuley scored a consolation goal for West Brom in the 57th minute of the game.
Özil received a rating of 8.02 from Whoscored.com. The World Cup winner made six key passes and one successful dribble. Özil made 81 passes and maintained a passing accuracy of 91.4%.
Arsenal finished the season in third place following todays result and will qualify directly to the UEFA Champions League group stages next season.
Özil has six assists and four goals in 21 appearances in the Premier League this season.
The former Real Madrid player has been in good form since returning from injury winning two Vitality Arsenal Player of the Month as well as a PFA Fans Player of the Month awards.
The 26-year-old has covered more distance, scored more goals, provided more assists and improved his sprinting since returning from injury at the start of 2015 according to the official Premier League website.